Block copolymer directed self-assembly defect modes induced...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 05 Vol. 38; Iss. 3

Block copolymer directed self-assembly defect modes induced by localized errors in chemoepitaxial guiding underlayers: A molecular simulation study

Delony, Jakin B., Ludovice, Peter J., Henderson, Clifford L.
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Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5131639
Date:
May, 2020
File:
PDF, 4.09 MB
2020
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