Improvement of Characteristics in SOS/MOSFETs by Laser...

Japanese Journal of Applied Physics 1982 / 01 Vol. 21; Iss. S1

Improvement of Characteristics in SOS/MOSFETs by Laser Annealing

Kobayashi, Yutaka, Ikeda, Takahide, Nakamura, Minoru, Suzuki, Takaya
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
21
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAPS.21S1.181
Date:
January, 1982
File:
PDF, 991 KB
1982
Conversion to is in progress
Conversion to is failed