In Situ Reaction Mechanism Study on Atomic Layer Deposition of Intermetallic Co 3 Sn 2 Thin Films
Nieminen, Heta-Elisa, Kaipio, Mikko, Ritala, MikkoJournal:
Chemistry of Materials
DOI:
10.1021/acs.chemmater.0c01003
Date:
September, 2020
File:
PDF, 1.24 MB
2020