Temperature Compensation of Thermally Actuated, In-Plane...

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Journal of Microelectromechanical Systems 2020

Temperature Compensation of Thermally Actuated, In-Plane Resonant Gas Sensor Using Embedded Oxide-Filled Trenches

Schwartz, Steven A., Brand, Oliver, Beardslee, Luke A.
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Year:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.3014502
File:
PDF, 995 KB
2020
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