STUDY OF THE EFFECT OF THE BUFFER LAYER ON THE SUBSTRATE...

Nanotechnologies in Russia 2019 / 11 Vol. 14; Iss. 11-12

STUDY OF THE EFFECT OF THE BUFFER LAYER ON THE SUBSTRATE SURFACE AND THE PROCESS MEDIUM ON NANOCLUSTER FORMATION IN THE Si1 – xGex STRUCTURE

Strogova, A. S., Kovalevskii, A. A.
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Volume:
14
Journal:
Nanotechnologies in Russia
DOI:
10.1134/S1995078019060168
Date:
November, 2019
File:
PDF, 1.18 MB
2019
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