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Electrical variable capacitor using symmetrical switch configuration for reducing switch voltage in RF plasma systems
Min, Juhwa, Chae, Beomseok, Suh, Yongsug, Kim, Jinho, Kim, HyunbaeJournal:
Journal of Power Electronics
DOI:
10.1007/s43236-020-00129-0
Date:
August, 2020
File:
PDF, 2.78 MB
2020