Quantitative Thickness Measurements of Thin Oxides Using...

Microscopy and Microanalysis 2001 / 08 Vol. 7; Iss. S2

Quantitative Thickness Measurements of Thin Oxides Using Low Energy Loss Filtered TEM Imaging

Pantel, R., Sondergard, E., Delille, D., Kwakman, L.F.Tz.
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Volume:
7
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927600028877
Date:
August, 2001
File:
PDF, 1019 KB
2001
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