Simple technique to fabricate microscale and nanoscale...

Frontiers of Optoelectronics 2009 / 09 Vol. 2; Iss. 3

Simple technique to fabricate microscale and nanoscale silicon waveguide devices

Yao Chen, Junbo Feng, Zhiping Zhou, Christopher J. Summers, David S. Citrin, Jun Yu
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Volume:
2
Language:
english
Pages:
4
DOI:
10.1007/s12200-009-0049-1
Date:
September, 2009
File:
PDF, 153 KB
english, 2009
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