Micromachined Si cantilever arrays for parallel AFM...

Journal of Mechanical Science and Technology 2008 / 02 Vol. 22; Iss. 2

Micromachined Si cantilever arrays for parallel AFM operation

Yoomin Ahn, Takahito Ono, Masayoshi Esashi
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Volume:
22
Language:
english
Pages:
4
DOI:
10.1007/s12206-007-1029-2
Date:
February, 2008
File:
PDF, 548 KB
english, 2008
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