Design and fabrication of a scanning electron microscope...

Journal of Mechanical Science and Technology 2008 / 09 Vol. 22; Iss. 9

Design and fabrication of a scanning electron microscope using a finite element analysis for electron optical system

Man-Jin Park, Dong Hwan Kim, Keun Park, Dong Young Jang, Dong-Chul Han
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Volume:
22
Language:
english
Pages:
13
DOI:
10.1007/s12206-008-0317-9
Date:
September, 2008
File:
PDF, 2.86 MB
english, 2008
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