Multi-layer alignment control of a large area...

Journal of Mechanical Science and Technology 2009 / 04 Vol. 23; Iss. 4

Multi-layer alignment control of a large area nano-imprinting stage

Hong Jae Yim, Yong Hoon Lee, Sung Hoon Lee, Jay Il Jeong, Si-Hyung Lim
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Volume:
23
Language:
english
Pages:
4
DOI:
10.1007/s12206-009-0347-y
Date:
April, 2009
File:
PDF, 801 KB
english, 2009
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