Assessment of adhesion between thin film and silicon based...

Journal of Mechanical Science and Technology 2010 / 01 Vol. 24; Iss. 1

Assessment of adhesion between thin film and silicon based on a scratch test

Jung-Eun Lee, Hyun-Joon Kim, Dae-Eun Kim
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Volume:
24
Language:
english
Pages:
5
DOI:
10.1007/s12206-009-1124-7
Date:
January, 2010
File:
PDF, 791 KB
english, 2010
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