Wiring techniques for large size silicon probe using electroplating
Aono, Takanori, Kanamaru, Masatoshi, Kohno, Ryuji, Hosogane, AtsushiJournal:
Electronics and Communications in Japan
DOI:
10.1002/ecj.12266
Date:
July, 2020
File:
PDF, 4.78 MB
2020