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An ultra-high pressure sensor based on SOI piezoresistive material
Yulong Zhao, Xudong Fang, Zhuangde Jiang, Libo ZhaoVolume:
24
Language:
english
Pages:
6
DOI:
10.1007/s12206-010-0515-0
Date:
August, 2010
File:
PDF, 430 KB
english, 2010