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Dynamic out-of-plane displacement measurement using the instantaneous analysis phase-shifting method
Yeh, Hong-Yih, Hsu, Ying-Kai, Wei, An-Chi, Lee, Ju-YiJournal:
Microsystem Technologies
DOI:
10.1007/s00542-020-05018-x
Date:
September, 2020
File:
PDF, 4.90 MB
2020