AC and DC bias effect on capacitance–voltage...

AC and DC bias effect on capacitance–voltage nonlinearities in Au/HfO2/M (M = Pt, TiN, W, and AlCu) MIM capacitors: effect of the bottom electrode material

Khaldi, Othmen, Jomni, Fathi, Gonon, Patrice, Vallée, Christophe
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Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-020-04440-1
Date:
September, 2020
File:
PDF, 653 KB
2020
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