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AC and DC bias effect on capacitanceâvoltage nonlinearities in Au/HfO2/M (Mâ=âPt, TiN, W, and AlCu) MIM capacitors: effect of the bottom electrode material
Khaldi, Othmen, Jomni, Fathi, Gonon, Patrice, Vallée, ChristopheJournal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-020-04440-1
Date:
September, 2020
File:
PDF, 653 KB
2020