Universal inherent fluctuations in statistical counting of...

Scientific Reports 2020 / 12 Vol. 10; Iss. 1

Universal inherent fluctuations in statistical counting of large particles in slurry used for semiconductor manufacturing

Lee, Manhee, Kim, Dongwon, Heo, Tae-Young, Park, Taewon, Kim, Wonjung, Choi, Daejin, Kim, Hyunwoo, Kim, Jaehyun
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Volume:
10
Journal:
Scientific Reports
DOI:
10.1038/s41598-020-71768-3
Date:
December, 2020
File:
PDF, 2.13 MB
2020
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