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The impact of focused ion beam induced damage on scanning spreading resistance microscopy measurements
Pandey, Komal, Paredis, Kristof, Hantschel, Thomas, Drijbooms, Chris, Vandervorst, WilfriedVolume:
10
Journal:
Scientific Reports
DOI:
10.1038/s41598-020-71826-w
Date:
December, 2020
File:
PDF, 5.60 MB
2020