Implementation of autofocus in alignment system for layered...

Transactions of Tianjin University 2009 / 08 Vol. 15; Iss. 4

Implementation of autofocus in alignment system for layered imprint fabrication

Quandai Wang, Yugang Duan, Bingheng Lu, Jiawei Xiang, Lianfa Yang
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Volume:
15
Language:
english
Pages:
6
DOI:
10.1007/s12209-009-0052-z
Date:
August, 2009
File:
PDF, 500 KB
english, 2009
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