Modelling, characterization and testing of an ortho-planar...

Modelling, characterization and testing of an ortho-planar micro-valve

Olivier Smal, Bruno Dehez, Benoît Raucent, Michaël De Volder, Jan Peirs, Dominiek Reynaerts, Frederik Ceyssens, Johan Coosemans, Robert Puers
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Volume:
4
Language:
english
Pages:
13
DOI:
10.1007/s12213-008-0015-9
Date:
December, 2008
File:
PDF, 693 KB
english, 2008
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