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[IEEE 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2020.8.24-2020.8.26)] 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Advanced Inspection Methodology for the Maximum Extension of Nitride Test Wafer Recycling
Ke, Yu-Yuan, Chen, Kuang-Hsiu, Chen, Shin-Ru, Huang, Guan-Wei, Yu, Wesley, Chuang, Po-Jen, Lin, Chun-Li, Huang, Chih-Wei, Chen, Jun-Ming, Chang, Shao-Ju, Janardan, Nachiketa, Lee, Tung-Ying, Chen, EthYear:
2020
DOI:
10.1109/asmc49169.2020.9185221
File:
PDF, 258 KB
2020