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Hierarchical Integration of Thin-Film NiTi Actuators Using Additive Manufacturing for Microrobotics
Velez, Camilo, Patel, Dinesh K., Kim, Sukjun, Babaei, Mahnoush, Knick, Cory R., Smith, Gabriel L., Bergbreiter, SarahYear:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2020.3019064
File:
PDF, 4.12 MB
2020