The Design of Aluminum Nitride-Based Lead-Free Piezoelectric MEMS Accelerometer System
Chen, Ze-Hui, Li, Cheng-Ying, Chu, Sheng-Yuan, Tsai, Cheng-Che, Wang, Yi-Hsun, Kao, Hsueh-Yu, Wei, Chia-Ling, Huang, Yen-Hsiang, Hsiao, Po-Yu, Liu, Yun-HuiYear:
2020
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2020.3019230
File:
PDF, 2.50 MB
2020
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