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Testing of a Strained Silicon based 3D Stress Sensor for Out-of-Plane Stress measurements
Balbola, Amr Adel, Kayed, Mohamed Omar, Lou, Edmond, Moussa, WaliedYear:
2020
Journal:
IEEE/ASME Transactions on Mechatronics
DOI:
10.1109/tmech.2020.3016294
File:
PDF, 1.26 MB
2020