AZ4620 Photoresist as an Alternative Sacrificial Layer for...

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Journal of Electronic Materials 2020 / 09

AZ4620 Photoresist as an Alternative Sacrificial Layer for Surface Micromachining

Minhas, Ashudeep, Bajpai, Anuroop, Mehta, Khushbu, Kumar, Prem, Kumar, Amit, Bansal, Deepak
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Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-020-08438-7
Date:
September, 2020
File:
PDF, 1008 KB
2020
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