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[IEEE 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2020.8.24-2020.8.26)] 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Effect of In-situ Capping on Phase Change Memory Device Performance : AEPM: Advance Equipment Processes and Materials
Brew, Kevin W., Conti, Richard, Saraf, Iqbal, Cheng, Cheng-wei, Cheng, Cheng-wei, Lee, William, Xu, Yin, Saulnier, Nicole, Masuda, Takeshi, Jimbo, TakehitoYear:
2020
DOI:
10.1109/asmc49169.2020.9185322
File:
PDF, 193 KB
2020