Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects
RaÅ¡ljiÄ RafajiloviÄ, Milena, RaduloviÄ, Katarina, SmiljaniÄ, MilÄe M., LaziÄ, Žarko, JakÅ¡iÄ, Zoran, Stanisavljev, Dragomir, RadoviÄ, Dana VasiljeviÄVolume:
11
Journal:
Micromachines
DOI:
10.3390/mi11090818
Date:
August, 2020
File:
PDF, 4.31 MB
2020