Atomic Layer Deposition of Al doped MoS 2...

ACS Applied Nano Materials 2020 / 09

Atomic Layer Deposition of Al doped MoS 2 : Synthesizing a p -type 2D semiconductor with tunable carrier density

Vandalon, Vincent, Verheijen, Marcel A., Kessels, Wilhelmus M.M., Bol, Ageeth A.
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Journal:
ACS Applied Nano Materials
DOI:
10.1021/acsanm.0c02167
Date:
September, 2020
File:
PDF, 673 KB
2020
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