[IEEE 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2020.8.24-2020.8.26)] 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Characteristics of SiGe Oxidation and Ge Loss according to Ge Content
Kwon, Meejung, Han, SongI, Ryu, Je Hyeok, Lee, Chiyoung, Lee, Yoon Young, Kim, Byung HoonYear:
2020
DOI:
10.1109/asmc49169.2020.9185260
File:
PDF, 282 KB
2020