Black titanium oxynitride thin films prepared by nitrogen...

Applied Surface Science 2020 / 12 Vol. 534

Black titanium oxynitride thin films prepared by nitrogen plasma-assisted pulsed laser deposition for flat-panel displays

Yamaguchi, Mina, Ishii, Akihiro, Oikawa, Itaru, Takamura, Hitoshi
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Volume:
534
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2020.147616
Date:
December, 2020
File:
PDF, 2.05 MB
2020
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