Unprecedented uniform 3D growth integration of 10-layer...

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Nano Letters 2020 / 09

Unprecedented uniform 3D growth integration of 10-layer stacked Si nanowires on tightly confined sidewall grooves

Hu, Ruijin, Xu, Shun, Wang, Junzhuan, Shi, Yi, Xu, Jun, Chen, Kunji, Yu, Linwei
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Journal:
Nano Letters
DOI:
10.1021/acs.nanolett.0c02950
Date:
September, 2020
File:
PDF, 1.67 MB
2020
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