Growth of Al-rich AlGaN thin films by purely thermal atomic...

Journal of Alloys and Compounds 2021 / 02 Vol. 854

Growth of Al-rich AlGaN thin films by purely thermal atomic layer deposition

Choi, Seok, Ansari, Abu Saad, Yun, Hee Ju, Kim, Hogyoung, Shong, Bonggeun, Choi, Byung Joon
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Volume:
854
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2020.157186
Date:
February, 2021
File:
PDF, 3.24 MB
2021
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