Low-Temperature Fabrication (≤ 150 °C) of High-Quality...

  • Main
  • 2020 / 09
  • Low-Temperature Fabrication (≤ 150 °C) of High-Quality...
ACS Applied Electronic Materials 2020 / 09

Low-Temperature Fabrication (≤ 150 °C) of High-Quality Sputtered Silicon Oxide Thin Film with Hydrogen Plasma Treatment

Seo, Taewon, Park, Hyuk, Jeon, Gilsu, Yun, Juyoung, Park, Seongmin, Seong, Suwon, Chung, Yoonyoung
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Journal:
ACS Applied Electronic Materials
DOI:
10.1021/acsaelm.0c00631
Date:
September, 2020
File:
PDF, 2.87 MB
2020
Conversion to is in progress
Conversion to is failed