Numerical investigation of ion energy and angular distributions in a dc-biased H 2 inductively coupled discharge
Song, Sha-Sha, Liu, Wei, Yin, Shuai, Liu, Yong-Xin, Gao, Fei, Wang, You-Nian, Zhao, Yong-TaoVolume:
27
Journal:
Physics of Plasmas
DOI:
10.1063/5.0012770
Date:
September, 2020
File:
PDF, 2.84 MB
2020