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Realization of closed-loop optimization of epitaxial titanium nitride thin-film growth via machine learning
Ohkubo, Isao, Hou, Zhufeng, Lee, Jiyeon N., Aizawa, Takashi, Lippmaa, Mikk, Chikyow, Toyohiro, Tsuda, Koji, Mori, TakaoJournal:
Materials Today Physics
DOI:
10.1016/j.mtphys.2020.100296
Date:
September, 2020
File:
PDF, 1.79 MB
2020