Novel resonant MEMS sensor for the detection of particles with dielectric properties in aged lubricating oils
Patocka, Florian, Schneidhofer, Christoph, Dörr, Nicole, Schneider, Michael, Schmid, UlrichVolume:
315
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.112290
Date:
November, 2020
File:
PDF, 3.74 MB
2020