Molecular dynamics simulation of the combination effect of the tip inclination and scratching direction on nanomachining of single crystal silicon
Yan, Yongda, Li, Zihan, Jia, Junshuai, Wang, Jiqiang, Geng, YanquanVolume:
186
Journal:
Computational Materials Science
DOI:
10.1016/j.commatsci.2020.110014
Date:
January, 2021
File:
PDF, 12.92 MB
2021