Extracting bulk defect parameters in silicon wafers using machine learning models
Buratti, Yoann, Le Gia, Quoc Thong, Dick, Josef, Zhu, Yan, Hameiri, ZivVolume:
6
Journal:
npj Computational Materials
DOI:
10.1038/s41524-020-00410-7
Date:
December, 2020
File:
PDF, 1.68 MB
2020