Thermomechanical Study and Fracture Properties of Silicon Wafer under Effect of Crystal Orientation
Romdhane, Mohamed Cherif Ben, Mrad, Hatem, Erchiqui, Fouad, Mrad, Ridha BenVolume:
521
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/521/1/012004
Date:
May, 2019
File:
PDF, 777 KB
2019