Machine vision based interferometry for measurement of...

IOP Conference Series Materials Science and Engineering 2020 / 06 Vol. 872

Machine vision based interferometry for measurement of flatness error in micro and nano manufacturing

Dabreo, Prince W, Joshi, Ketaki N, Patil, Bhushan T, Kokate, Meera B
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Volume:
872
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/872/1/012066
Date:
June, 2020
File:
PDF, 709 KB
2020
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