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AFM Microcantilever With a Collocated AlN Sensor-Actuator Pair: Enabling Efficient Q-Control for Dynamic Imaging
Mahdavi, Mohammad, Nikooienejad, Nastaran, Moheimani, S. O. RezaVolume:
29
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.3011826
Date:
October, 2020
File:
PDF, 3.63 MB
2020