Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators
Yang, Jeremy, Hamelin, Benoit, Ayazi, FarrokhYear:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.3022765
File:
PDF, 3.18 MB
2020