![](/img/cover-not-exists.png)
[IEEE 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2020.8.24-2020.8.26)] 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Advanced wafer backside bevel characterization using a geometry measurement
Striegler, Andre, Flach, Florian, Lindner, Thomas, Chee, Chiou Shoei, Jain, Priyank, Kanniyappan, MadhanYear:
2020
DOI:
10.1109/asmc49169.2020.9185196
File:
PDF, 471 KB
2020