[IEEE 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2020.8.24-2020.8.26)] 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Output Improvement in High Volume Memory Fabs by Reducing Recipe Qualifications
Keith, Chris, Chen, Ace, Albalak, Haim, Anvar, MaryamYear:
2020
DOI:
10.1109/asmc49169.2020.9185365
File:
PDF, 119 KB
2020