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[IEEE 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2020.8.24-2020.8.26)] 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Science of Sealing: Advanced Materials for High-Temperature Applications
Reger, Thomas S., Reichl, Gary J.Year:
2020
DOI:
10.1109/asmc49169.2020.9185380
File:
PDF, 131 KB
2020