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The Model of Etch Rates of Crystallographic Planes of Sapphire Based on Step Flow Mechanism
Wu, Guorong, Xing, YanVolume:
29
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2020.3013601
Date:
October, 2020
File:
PDF, 4.72 MB
2020