Correlation between Substrate Ion Fluxes and the Properties...

Coatings 2020 / 09 Vol. 10; Iss. 10

Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar + Ne Plasmas

Oliveira, João, Ferreira, Fábio, Serra, Ricardo, Kubart, Tomas, Vitelaru, Catalin, Cavaleiro, Albano
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Volume:
10
Journal:
Coatings
DOI:
10.3390/coatings10100914
Date:
September, 2020
File:
PDF, 3.01 MB
2020
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