Synthesis of Vertical Carbon Nanotube Interconnect Structures Using CMOS-Compatible Catalysts
Ma, Zichao, Zhou, Shaolin, Zhou, Changjian, Xiao, Ying, Li, Suwen, Chan, MansunVolume:
10
Journal:
Nanomaterials
DOI:
10.3390/nano10101918
Date:
September, 2020
File:
PDF, 2.02 MB
2020