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Development of Catalytic-CVD SiNx Passivation Process for AlGaN/GaN-on-Si HEMTs
Kang, Myoung-Jin, Kim, Hyun-Seop, Cha, Ho-Young, Seo, Kwang-SeokVolume:
10
Journal:
Crystals
DOI:
10.3390/cryst10090842
Date:
September, 2020
File:
PDF, 6.22 MB
2020