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Effects of various metal seed layers on the surface morphology and structural composition of the electroplated copper layer
Tae-Gyu Woo, Il-Song Park, Kyeong-Won SeolVolume:
15
Language:
english
Pages:
5
DOI:
10.1007/s12540-009-0293-3
Date:
April, 2009
File:
PDF, 573 KB
english, 2009